JPS5018216B1 - - Google Patents
Info
- Publication number
- JPS5018216B1 JPS5018216B1 JP45087810A JP8781070A JPS5018216B1 JP S5018216 B1 JPS5018216 B1 JP S5018216B1 JP 45087810 A JP45087810 A JP 45087810A JP 8781070 A JP8781070 A JP 8781070A JP S5018216 B1 JPS5018216 B1 JP S5018216B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
- Discharge Heating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691950290 DE1950290B2 (en) | 1969-10-06 | 1969-10-06 | High performance beam generation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5018216B1 true JPS5018216B1 (en) | 1975-06-27 |
Family
ID=5747430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45087810A Pending JPS5018216B1 (en) | 1969-10-06 | 1970-10-06 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5018216B1 (en) |
| AT (1) | AT296639B (en) |
| DE (1) | DE1950290B2 (en) |
| FR (1) | FR2065096A5 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3708184A1 (en) * | 1987-03-13 | 1988-09-22 | Broetje August Gmbh & Co | Low pollution gas burner - has perforated curved plate at discharge end, with cylindrical or bottle-shaped tube projecting outwards |
| FI84961C (en) * | 1989-02-02 | 1992-02-10 | Tampella Oy Ab | Method for generating high power electron curtain screens with high efficiency |
-
1969
- 1969-10-06 DE DE19691950290 patent/DE1950290B2/en active Granted
-
1970
- 1970-10-02 AT AT894470A patent/AT296639B/en not_active IP Right Cessation
- 1970-10-05 FR FR7036128A patent/FR2065096A5/en not_active Expired
- 1970-10-06 JP JP45087810A patent/JPS5018216B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2065096A5 (en) | 1971-07-23 |
| DE1950290A1 (en) | 1971-04-15 |
| AT296639B (en) | 1972-02-25 |
| DE1950290B2 (en) | 1975-10-09 |