JPS5016977Y2 - - Google Patents

Info

Publication number
JPS5016977Y2
JPS5016977Y2 JP3812371U JP3812371U JPS5016977Y2 JP S5016977 Y2 JPS5016977 Y2 JP S5016977Y2 JP 3812371 U JP3812371 U JP 3812371U JP 3812371 U JP3812371 U JP 3812371U JP S5016977 Y2 JPS5016977 Y2 JP S5016977Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3812371U
Other languages
Japanese (ja)
Other versions
JPS4733113U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3812371U priority Critical patent/JPS5016977Y2/ja
Publication of JPS4733113U publication Critical patent/JPS4733113U/ja
Application granted granted Critical
Publication of JPS5016977Y2 publication Critical patent/JPS5016977Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Discharge Heating (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP3812371U 1971-05-11 1971-05-11 Expired JPS5016977Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3812371U JPS5016977Y2 (de) 1971-05-11 1971-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3812371U JPS5016977Y2 (de) 1971-05-11 1971-05-11

Publications (2)

Publication Number Publication Date
JPS4733113U JPS4733113U (de) 1972-12-13
JPS5016977Y2 true JPS5016977Y2 (de) 1975-05-26

Family

ID=27907186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3812371U Expired JPS5016977Y2 (de) 1971-05-11 1971-05-11

Country Status (1)

Country Link
JP (1) JPS5016977Y2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4362632A (en) * 1974-08-02 1982-12-07 Lfe Corporation Gas discharge apparatus
JPS5824026Y2 (ja) * 1975-03-31 1983-05-23 トヨタ自動車株式会社 デイスクブレ−キジドウカンゲキチヨウセイソウチ

Also Published As

Publication number Publication date
JPS4733113U (de) 1972-12-13

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