JPS50157861A - - Google Patents

Info

Publication number
JPS50157861A
JPS50157861A JP49065940A JP6594074A JPS50157861A JP S50157861 A JPS50157861 A JP S50157861A JP 49065940 A JP49065940 A JP 49065940A JP 6594074 A JP6594074 A JP 6594074A JP S50157861 A JPS50157861 A JP S50157861A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49065940A
Other languages
Japanese (ja)
Other versions
JPS5711123B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6594074A priority Critical patent/JPS5711123B2/ja
Publication of JPS50157861A publication Critical patent/JPS50157861A/ja
Publication of JPS5711123B2 publication Critical patent/JPS5711123B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP6594074A 1974-06-12 1974-06-12 Expired JPS5711123B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6594074A JPS5711123B2 (enExample) 1974-06-12 1974-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6594074A JPS5711123B2 (enExample) 1974-06-12 1974-06-12

Publications (2)

Publication Number Publication Date
JPS50157861A true JPS50157861A (enExample) 1975-12-20
JPS5711123B2 JPS5711123B2 (enExample) 1982-03-02

Family

ID=13301452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6594074A Expired JPS5711123B2 (enExample) 1974-06-12 1974-06-12

Country Status (1)

Country Link
JP (1) JPS5711123B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06239440A (ja) * 1993-02-18 1994-08-30 Dainippon Screen Mfg Co Ltd 基板搬送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916859A (enExample) * 1972-06-09 1974-02-14
JPS4926940U (enExample) * 1972-06-12 1974-03-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916859A (enExample) * 1972-06-09 1974-02-14
JPS4926940U (enExample) * 1972-06-12 1974-03-07

Also Published As

Publication number Publication date
JPS5711123B2 (enExample) 1982-03-02

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