JPS50157861A - - Google Patents

Info

Publication number
JPS50157861A
JPS50157861A JP49065940A JP6594074A JPS50157861A JP S50157861 A JPS50157861 A JP S50157861A JP 49065940 A JP49065940 A JP 49065940A JP 6594074 A JP6594074 A JP 6594074A JP S50157861 A JPS50157861 A JP S50157861A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49065940A
Other languages
Japanese (ja)
Other versions
JPS5711123B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6594074A priority Critical patent/JPS5711123B2/ja
Publication of JPS50157861A publication Critical patent/JPS50157861A/ja
Publication of JPS5711123B2 publication Critical patent/JPS5711123B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP6594074A 1974-06-12 1974-06-12 Expired JPS5711123B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6594074A JPS5711123B2 (cg-RX-API-DMAC10.html) 1974-06-12 1974-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6594074A JPS5711123B2 (cg-RX-API-DMAC10.html) 1974-06-12 1974-06-12

Publications (2)

Publication Number Publication Date
JPS50157861A true JPS50157861A (cg-RX-API-DMAC10.html) 1975-12-20
JPS5711123B2 JPS5711123B2 (cg-RX-API-DMAC10.html) 1982-03-02

Family

ID=13301452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6594074A Expired JPS5711123B2 (cg-RX-API-DMAC10.html) 1974-06-12 1974-06-12

Country Status (1)

Country Link
JP (1) JPS5711123B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06239440A (ja) * 1993-02-18 1994-08-30 Dainippon Screen Mfg Co Ltd 基板搬送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916859A (cg-RX-API-DMAC10.html) * 1972-06-09 1974-02-14
JPS4926940U (cg-RX-API-DMAC10.html) * 1972-06-12 1974-03-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916859A (cg-RX-API-DMAC10.html) * 1972-06-09 1974-02-14
JPS4926940U (cg-RX-API-DMAC10.html) * 1972-06-12 1974-03-07

Also Published As

Publication number Publication date
JPS5711123B2 (cg-RX-API-DMAC10.html) 1982-03-02

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