JPS5015471B2 - - Google Patents

Info

Publication number
JPS5015471B2
JPS5015471B2 JP9188271A JP9188271A JPS5015471B2 JP S5015471 B2 JPS5015471 B2 JP S5015471B2 JP 9188271 A JP9188271 A JP 9188271A JP 9188271 A JP9188271 A JP 9188271A JP S5015471 B2 JPS5015471 B2 JP S5015471B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9188271A
Other languages
Japanese (ja)
Other versions
JPS4855880A (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9188271A priority Critical patent/JPS5015471B2/ja
Publication of JPS4855880A publication Critical patent/JPS4855880A/ja
Publication of JPS5015471B2 publication Critical patent/JPS5015471B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9188271A 1971-11-18 1971-11-18 Expired JPS5015471B2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9188271A JPS5015471B2 (en, 2012) 1971-11-18 1971-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9188271A JPS5015471B2 (en, 2012) 1971-11-18 1971-11-18

Publications (2)

Publication Number Publication Date
JPS4855880A JPS4855880A (en, 2012) 1973-08-06
JPS5015471B2 true JPS5015471B2 (en, 2012) 1975-06-05

Family

ID=14038917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9188271A Expired JPS5015471B2 (en, 2012) 1971-11-18 1971-11-18

Country Status (1)

Country Link
JP (1) JPS5015471B2 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336575U (en, 2012) * 1976-09-03 1978-03-31

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336575U (en, 2012) * 1976-09-03 1978-03-31

Also Published As

Publication number Publication date
JPS4855880A (en, 2012) 1973-08-06

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