JPS50150460A - - Google Patents

Info

Publication number
JPS50150460A
JPS50150460A JP5809474A JP5809474A JPS50150460A JP S50150460 A JPS50150460 A JP S50150460A JP 5809474 A JP5809474 A JP 5809474A JP 5809474 A JP5809474 A JP 5809474A JP S50150460 A JPS50150460 A JP S50150460A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5809474A
Other languages
Japanese (ja)
Other versions
JPS5824998B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49058094A priority Critical patent/JPS5824998B2/en
Publication of JPS50150460A publication Critical patent/JPS50150460A/ja
Publication of JPS5824998B2 publication Critical patent/JPS5824998B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP49058094A 1974-05-22 1974-05-22 Chiyo Onpa Souji Yuhaki Expired JPS5824998B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49058094A JPS5824998B2 (en) 1974-05-22 1974-05-22 Chiyo Onpa Souji Yuhaki

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49058094A JPS5824998B2 (en) 1974-05-22 1974-05-22 Chiyo Onpa Souji Yuhaki

Publications (2)

Publication Number Publication Date
JPS50150460A true JPS50150460A (en) 1975-12-02
JPS5824998B2 JPS5824998B2 (en) 1983-05-24

Family

ID=13074350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49058094A Expired JPS5824998B2 (en) 1974-05-22 1974-05-22 Chiyo Onpa Souji Yuhaki

Country Status (1)

Country Link
JP (1) JPS5824998B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121392U (en) * 1980-02-18 1981-09-16

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102543915B1 (en) 2018-04-09 2023-06-16 삼성디스플레이 주식회사 Substrate processing apparatus and substrate processing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916644A (en) * 1972-06-07 1974-02-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916644A (en) * 1972-06-07 1974-02-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121392U (en) * 1980-02-18 1981-09-16

Also Published As

Publication number Publication date
JPS5824998B2 (en) 1983-05-24

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