JPS50148285A - - Google Patents

Info

Publication number
JPS50148285A
JPS50148285A JP7866574A JP7866574A JPS50148285A JP S50148285 A JPS50148285 A JP S50148285A JP 7866574 A JP7866574 A JP 7866574A JP 7866574 A JP7866574 A JP 7866574A JP S50148285 A JPS50148285 A JP S50148285A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7866574A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7866574A priority Critical patent/JPS50148285A/ja
Publication of JPS50148285A publication Critical patent/JPS50148285A/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP7866574A 1974-05-02 1974-05-02 Pending JPS50148285A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7866574A JPS50148285A (cs) 1974-05-02 1974-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7866574A JPS50148285A (cs) 1974-05-02 1974-05-02

Publications (1)

Publication Number Publication Date
JPS50148285A true JPS50148285A (cs) 1975-11-27

Family

ID=13668145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7866574A Pending JPS50148285A (cs) 1974-05-02 1974-05-02

Country Status (1)

Country Link
JP (1) JPS50148285A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110126A (en) * 1979-02-16 1980-08-25 Seiko Epson Corp Preparation of antireflection film
JPS6468470A (en) * 1987-09-09 1989-03-14 Ulvac Seimaku Plasma electron beam heating source

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934483A (cs) * 1972-07-31 1974-03-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934483A (cs) * 1972-07-31 1974-03-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110126A (en) * 1979-02-16 1980-08-25 Seiko Epson Corp Preparation of antireflection film
JPS6468470A (en) * 1987-09-09 1989-03-14 Ulvac Seimaku Plasma electron beam heating source

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