JPS50147960A - - Google Patents

Info

Publication number
JPS50147960A
JPS50147960A JP49056274A JP5627474A JPS50147960A JP S50147960 A JPS50147960 A JP S50147960A JP 49056274 A JP49056274 A JP 49056274A JP 5627474 A JP5627474 A JP 5627474A JP S50147960 A JPS50147960 A JP S50147960A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49056274A
Other languages
Japanese (ja)
Other versions
JPS5415419B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5627474A priority Critical patent/JPS5415419B2/ja
Priority to US05/560,189 priority patent/US4115005A/en
Publication of JPS50147960A publication Critical patent/JPS50147960A/ja
Publication of JPS5415419B2 publication Critical patent/JPS5415419B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP5627474A 1974-05-20 1974-05-20 Expired JPS5415419B2 (en:Method)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP5627474A JPS5415419B2 (en:Method) 1974-05-20 1974-05-20
US05/560,189 US4115005A (en) 1974-05-20 1975-03-20 Method for optically measuring a roughness profile of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5627474A JPS5415419B2 (en:Method) 1974-05-20 1974-05-20

Publications (2)

Publication Number Publication Date
JPS50147960A true JPS50147960A (en:Method) 1975-11-27
JPS5415419B2 JPS5415419B2 (en:Method) 1979-06-14

Family

ID=13022493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5627474A Expired JPS5415419B2 (en:Method) 1974-05-20 1974-05-20

Country Status (2)

Country Link
US (1) US4115005A (en:Method)
JP (1) JPS5415419B2 (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5319053A (en) * 1976-08-06 1978-02-21 Toyoda Chuo Kenkyusho Kk Hollow coordinate measuring apparatus
JPH01113605A (ja) * 1987-10-28 1989-05-02 Kowa Co 立体形状測定装置
JPH09236407A (ja) * 1997-03-14 1997-09-09 Kowa Co 立体形状測定装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8501100A (nl) * 1985-04-15 1986-11-03 Optische Ind De Oude Delft Nv Werkwijze en stelsel voor het meten van het ruwheidsprofiel van een oppervlak.
US4920273A (en) * 1985-06-17 1990-04-24 View Engineering, Inc. Z-axis measurement system
DE10242373B4 (de) * 2002-09-12 2009-07-16 Siemens Ag Konfokaler Abstandssensor
US20100116059A1 (en) * 2004-07-26 2010-05-13 Spider Technologies Security Ltd. Vibration sensor having a single virtual center of mass
US9103664B2 (en) * 2010-04-01 2015-08-11 Tokyo Electron Limited Automated process control using an adjusted metrology output signal

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3567320A (en) * 1968-12-23 1971-03-02 Optomechanisms Inc Non-contact optical measuring probe

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3561876A (en) * 1968-03-11 1971-02-09 Robert Hoffman Detecting and measuring apparatus using polarization interferometry
GB1337741A (en) * 1970-06-09 1973-11-21 Vickers Ltd Testing reflecting surfaces
FR2116872A5 (fr) * 1970-12-10 1972-07-21 Compteurs Comp D Perfectionnements aux dispositifs palpeurs optiques
US3788741A (en) * 1972-07-26 1974-01-29 Syst Res Labor Inc Distance indicating optical probe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3567320A (en) * 1968-12-23 1971-03-02 Optomechanisms Inc Non-contact optical measuring probe

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5319053A (en) * 1976-08-06 1978-02-21 Toyoda Chuo Kenkyusho Kk Hollow coordinate measuring apparatus
JPH01113605A (ja) * 1987-10-28 1989-05-02 Kowa Co 立体形状測定装置
JPH09236407A (ja) * 1997-03-14 1997-09-09 Kowa Co 立体形状測定装置

Also Published As

Publication number Publication date
JPS5415419B2 (en:Method) 1979-06-14
US4115005A (en) 1978-09-19

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