JPS50147286A - - Google Patents
Info
- Publication number
- JPS50147286A JPS50147286A JP5343074A JP5343074A JPS50147286A JP S50147286 A JPS50147286 A JP S50147286A JP 5343074 A JP5343074 A JP 5343074A JP 5343074 A JP5343074 A JP 5343074A JP S50147286 A JPS50147286 A JP S50147286A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5343074A JPS50147286A (en) | 1974-05-15 | 1974-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5343074A JPS50147286A (en) | 1974-05-15 | 1974-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50147286A true JPS50147286A (en) | 1975-11-26 |
Family
ID=12942612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5343074A Pending JPS50147286A (en) | 1974-05-15 | 1974-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50147286A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60251681A (en) * | 1984-05-29 | 1985-12-12 | Hitachi Electronics Eng Co Ltd | Inspection device of wafer for surface elastic wave filter |
| JP2010048813A (en) * | 2002-03-22 | 2010-03-04 | Applied Materials Israel Ltd | Wafer defect detection system with traveling lens multi-beam scanner |
-
1974
- 1974-05-15 JP JP5343074A patent/JPS50147286A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60251681A (en) * | 1984-05-29 | 1985-12-12 | Hitachi Electronics Eng Co Ltd | Inspection device of wafer for surface elastic wave filter |
| JP2010048813A (en) * | 2002-03-22 | 2010-03-04 | Applied Materials Israel Ltd | Wafer defect detection system with traveling lens multi-beam scanner |
| JP2010060563A (en) * | 2002-03-22 | 2010-03-18 | Applied Materials Israel Ltd | Wafer defect detection system with traveling lens multi-beam scanner |