JPS50146529A - - Google Patents

Info

Publication number
JPS50146529A
JPS50146529A JP5805574A JP5805574A JPS50146529A JP S50146529 A JPS50146529 A JP S50146529A JP 5805574 A JP5805574 A JP 5805574A JP 5805574 A JP5805574 A JP 5805574A JP S50146529 A JPS50146529 A JP S50146529A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5805574A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5805574A priority Critical patent/JPS50146529A/ja
Publication of JPS50146529A publication Critical patent/JPS50146529A/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP5805574A 1974-05-15 1974-05-15 Pending JPS50146529A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5805574A JPS50146529A (en) 1974-05-15 1974-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5805574A JPS50146529A (en) 1974-05-15 1974-05-15

Publications (1)

Publication Number Publication Date
JPS50146529A true JPS50146529A (en) 1975-11-25

Family

ID=13073214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5805574A Pending JPS50146529A (en) 1974-05-15 1974-05-15

Country Status (1)

Country Link
JP (1) JPS50146529A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528335A (en) * 1978-08-16 1980-02-28 Matsushita Electric Ind Co Ltd Induction heating type evaporation apparatus for ultrafine particle
JPS5551381U (en) * 1978-09-29 1980-04-04
JPH01136966A (en) * 1987-11-24 1989-05-30 Kobe Steel Ltd Physical vapor deposition apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501555B1 (en) * 1969-07-24 1975-01-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501555B1 (en) * 1969-07-24 1975-01-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528335A (en) * 1978-08-16 1980-02-28 Matsushita Electric Ind Co Ltd Induction heating type evaporation apparatus for ultrafine particle
JPS5551381U (en) * 1978-09-29 1980-04-04
JPH01136966A (en) * 1987-11-24 1989-05-30 Kobe Steel Ltd Physical vapor deposition apparatus

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