JPS5014268A - - Google Patents
Info
- Publication number
- JPS5014268A JPS5014268A JP6297173A JP6297173A JPS5014268A JP S5014268 A JPS5014268 A JP S5014268A JP 6297173 A JP6297173 A JP 6297173A JP 6297173 A JP6297173 A JP 6297173A JP S5014268 A JPS5014268 A JP S5014268A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6297173A JPS5225291B2 (ja) | 1973-06-06 | 1973-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6297173A JPS5225291B2 (ja) | 1973-06-06 | 1973-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5014268A true JPS5014268A (ja) | 1975-02-14 |
| JPS5225291B2 JPS5225291B2 (ja) | 1977-07-06 |
Family
ID=13215726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6297173A Expired JPS5225291B2 (ja) | 1973-06-06 | 1973-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5225291B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5283654U (ja) * | 1975-12-18 | 1977-06-22 | ||
| JPS52143751A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Test piece tilt unit for electronic microscope |
| WO2023127083A1 (ja) * | 2021-12-28 | 2023-07-06 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
1973
- 1973-06-06 JP JP6297173A patent/JPS5225291B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5283654U (ja) * | 1975-12-18 | 1977-06-22 | ||
| JPS52143751A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Test piece tilt unit for electronic microscope |
| WO2023127083A1 (ja) * | 2021-12-28 | 2023-07-06 | 株式会社日立ハイテク | 荷電粒子線装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5225291B2 (ja) | 1977-07-06 |