JPS50141261A - - Google Patents
Info
- Publication number
- JPS50141261A JPS50141261A JP4628674A JP4628674A JPS50141261A JP S50141261 A JPS50141261 A JP S50141261A JP 4628674 A JP4628674 A JP 4628674A JP 4628674 A JP4628674 A JP 4628674A JP S50141261 A JPS50141261 A JP S50141261A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49046286A JPS5847824B2 (en) | 1974-04-24 | 1974-04-24 | SouchidenshikenbikiyoutoyouShyoutenAwasehouhou |
| GB5526374A GB1477030A (en) | 1973-12-24 | 1974-12-20 | Method and apparatus for the automatic focussing of electron beams in electron optical apparatus |
| FR7442532A FR2255701B1 (en) | 1973-12-24 | 1974-12-23 | |
| DE2461202A DE2461202C3 (en) | 1973-12-24 | 1974-12-23 | Method for automatically focusing the electron beam on the sample of a scanning electron microscope and scanning electron microscope for carrying out the method |
| US05/536,188 US3937959A (en) | 1973-12-24 | 1974-12-24 | Method and apparatus for automatically focusing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49046286A JPS5847824B2 (en) | 1974-04-24 | 1974-04-24 | SouchidenshikenbikiyoutoyouShyoutenAwasehouhou |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50141261A true JPS50141261A (en) | 1975-11-13 |
| JPS5847824B2 JPS5847824B2 (en) | 1983-10-25 |
Family
ID=12742963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49046286A Expired JPS5847824B2 (en) | 1973-12-24 | 1974-04-24 | SouchidenshikenbikiyoutoyouShyoutenAwasehouhou |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5847824B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5212560A (en) * | 1975-07-21 | 1977-01-31 | Hitachi Ltd | Electronic beam probe control device |
| JPS52136547U (en) * | 1976-04-10 | 1977-10-17 | ||
| JPS556784A (en) * | 1979-03-28 | 1980-01-18 | Jeol Ltd | Method and device for astrigmatism correction in scanning electron microscope |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5047561A (en) * | 1973-08-15 | 1975-04-28 |
-
1974
- 1974-04-24 JP JP49046286A patent/JPS5847824B2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5047561A (en) * | 1973-08-15 | 1975-04-28 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5212560A (en) * | 1975-07-21 | 1977-01-31 | Hitachi Ltd | Electronic beam probe control device |
| JPS52136547U (en) * | 1976-04-10 | 1977-10-17 | ||
| JPS5816136Y2 (en) * | 1976-04-10 | 1983-04-01 | 株式会社島津製作所 | Focusing device for electron beam scanning equipment |
| JPS556784A (en) * | 1979-03-28 | 1980-01-18 | Jeol Ltd | Method and device for astrigmatism correction in scanning electron microscope |
| JPS6151377B2 (en) * | 1979-03-28 | 1986-11-08 | Nippon Electron Optics Lab |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5847824B2 (en) | 1983-10-25 |