JPS50140357U - - Google Patents
Info
- Publication number
- JPS50140357U JPS50140357U JP5184474U JP5184474U JPS50140357U JP S50140357 U JPS50140357 U JP S50140357U JP 5184474 U JP5184474 U JP 5184474U JP 5184474 U JP5184474 U JP 5184474U JP S50140357 U JPS50140357 U JP S50140357U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5184474U JPS50140357U (enExample) | 1974-05-08 | 1974-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5184474U JPS50140357U (enExample) | 1974-05-08 | 1974-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50140357U true JPS50140357U (enExample) | 1975-11-19 |
Family
ID=28197755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5184474U Pending JPS50140357U (enExample) | 1974-05-08 | 1974-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50140357U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6337629A (ja) * | 1986-07-31 | 1988-02-18 | Tokyo Electron Ltd | プラズマ装置 |
-
1974
- 1974-05-08 JP JP5184474U patent/JPS50140357U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6337629A (ja) * | 1986-07-31 | 1988-02-18 | Tokyo Electron Ltd | プラズマ装置 |