JPS50140067A - - Google Patents
Info
- Publication number
- JPS50140067A JPS50140067A JP4647774A JP4647774A JPS50140067A JP S50140067 A JPS50140067 A JP S50140067A JP 4647774 A JP4647774 A JP 4647774A JP 4647774 A JP4647774 A JP 4647774A JP S50140067 A JPS50140067 A JP S50140067A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4647774A JPS50140067A (enExample) | 1974-04-26 | 1974-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4647774A JPS50140067A (enExample) | 1974-04-26 | 1974-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50140067A true JPS50140067A (enExample) | 1975-11-10 |
Family
ID=12748262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4647774A Pending JPS50140067A (enExample) | 1974-04-26 | 1974-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50140067A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6482541A (en) * | 1987-09-25 | 1989-03-28 | Hitachi Ltd | Method and device for measuring semiconductor surface |
| JPH07167902A (ja) * | 1994-09-26 | 1995-07-04 | Hitachi Ltd | 表面計測方法 |
| JPH07169809A (ja) * | 1994-09-26 | 1995-07-04 | Hitachi Ltd | 表面計測装置 |
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1974
- 1974-04-26 JP JP4647774A patent/JPS50140067A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6482541A (en) * | 1987-09-25 | 1989-03-28 | Hitachi Ltd | Method and device for measuring semiconductor surface |
| JPH07167902A (ja) * | 1994-09-26 | 1995-07-04 | Hitachi Ltd | 表面計測方法 |
| JPH07169809A (ja) * | 1994-09-26 | 1995-07-04 | Hitachi Ltd | 表面計測装置 |