JPS50139083A - - Google Patents

Info

Publication number
JPS50139083A
JPS50139083A JP4721574A JP4721574A JPS50139083A JP S50139083 A JPS50139083 A JP S50139083A JP 4721574 A JP4721574 A JP 4721574A JP 4721574 A JP4721574 A JP 4721574A JP S50139083 A JPS50139083 A JP S50139083A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4721574A
Other languages
Japanese (ja)
Other versions
JPS5635748B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4721574A priority Critical patent/JPS5635748B2/ja
Publication of JPS50139083A publication Critical patent/JPS50139083A/ja
Publication of JPS5635748B2 publication Critical patent/JPS5635748B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4721574A 1974-04-26 1974-04-26 Expired JPS5635748B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4721574A JPS5635748B2 (https=) 1974-04-26 1974-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4721574A JPS5635748B2 (https=) 1974-04-26 1974-04-26

Publications (2)

Publication Number Publication Date
JPS50139083A true JPS50139083A (https=) 1975-11-06
JPS5635748B2 JPS5635748B2 (https=) 1981-08-19

Family

ID=12768925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4721574A Expired JPS5635748B2 (https=) 1974-04-26 1974-04-26

Country Status (1)

Country Link
JP (1) JPS5635748B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53128353U (https=) * 1977-03-22 1978-10-12

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4092221C2 (de) * 1989-12-11 1994-04-21 Hitachi Ltd Vakuumverarbeitungsapparatur und Vakuumverarbeitungsverfahren

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53128353U (https=) * 1977-03-22 1978-10-12

Also Published As

Publication number Publication date
JPS5635748B2 (https=) 1981-08-19

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