JPS50137475A - - Google Patents
Info
- Publication number
- JPS50137475A JPS50137475A JP4396374A JP4396374A JPS50137475A JP S50137475 A JPS50137475 A JP S50137475A JP 4396374 A JP4396374 A JP 4396374A JP 4396374 A JP4396374 A JP 4396374A JP S50137475 A JPS50137475 A JP S50137475A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4396374A JPS50137475A (ja) | 1974-04-18 | 1974-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4396374A JPS50137475A (ja) | 1974-04-18 | 1974-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50137475A true JPS50137475A (ja) | 1975-10-31 |
Family
ID=12678349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4396374A Pending JPS50137475A (ja) | 1974-04-18 | 1974-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50137475A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384029A (ja) * | 1986-09-27 | 1988-04-14 | Tokyo Electron Ltd | 洗浄装置 |
-
1974
- 1974-04-18 JP JP4396374A patent/JPS50137475A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384029A (ja) * | 1986-09-27 | 1988-04-14 | Tokyo Electron Ltd | 洗浄装置 |