JPS50135737U - - Google Patents
Info
- Publication number
- JPS50135737U JPS50135737U JP4679574U JP4679574U JPS50135737U JP S50135737 U JPS50135737 U JP S50135737U JP 4679574 U JP4679574 U JP 4679574U JP 4679574 U JP4679574 U JP 4679574U JP S50135737 U JPS50135737 U JP S50135737U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4679574U JPS5518363Y2 (de) | 1974-04-23 | 1974-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4679574U JPS5518363Y2 (de) | 1974-04-23 | 1974-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50135737U true JPS50135737U (de) | 1975-11-08 |
| JPS5518363Y2 JPS5518363Y2 (de) | 1980-04-28 |
Family
ID=28183868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4679574U Expired JPS5518363Y2 (de) | 1974-04-23 | 1974-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5518363Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020200493A (ja) * | 2019-06-07 | 2020-12-17 | 株式会社アルバック | 真空蒸着装置用の蒸着源 |
-
1974
- 1974-04-23 JP JP4679574U patent/JPS5518363Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020200493A (ja) * | 2019-06-07 | 2020-12-17 | 株式会社アルバック | 真空蒸着装置用の蒸着源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5518363Y2 (de) | 1980-04-28 |