JPS50135060U - - Google Patents

Info

Publication number
JPS50135060U
JPS50135060U JP4691474U JP4691474U JPS50135060U JP S50135060 U JPS50135060 U JP S50135060U JP 4691474 U JP4691474 U JP 4691474U JP 4691474 U JP4691474 U JP 4691474U JP S50135060 U JPS50135060 U JP S50135060U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4691474U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4691474U priority Critical patent/JPS50135060U/ja
Publication of JPS50135060U publication Critical patent/JPS50135060U/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP4691474U 1974-04-24 1974-04-24 Pending JPS50135060U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4691474U JPS50135060U (enrdf_load_stackoverflow) 1974-04-24 1974-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4691474U JPS50135060U (enrdf_load_stackoverflow) 1974-04-24 1974-04-24

Publications (1)

Publication Number Publication Date
JPS50135060U true JPS50135060U (enrdf_load_stackoverflow) 1975-11-07

Family

ID=28184203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4691474U Pending JPS50135060U (enrdf_load_stackoverflow) 1974-04-24 1974-04-24

Country Status (1)

Country Link
JP (1) JPS50135060U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6337629A (ja) * 1986-07-31 1988-02-18 Tokyo Electron Ltd プラズマ装置
JPH0350050U (enrdf_load_stackoverflow) * 1989-09-25 1991-05-15
JP2014065934A (ja) * 2012-09-25 2014-04-17 Nippon Electric Glass Co Ltd 膜付基板の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6337629A (ja) * 1986-07-31 1988-02-18 Tokyo Electron Ltd プラズマ装置
JPH0350050U (enrdf_load_stackoverflow) * 1989-09-25 1991-05-15
JP2014065934A (ja) * 2012-09-25 2014-04-17 Nippon Electric Glass Co Ltd 膜付基板の製造方法

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