JPS5013476U - - Google Patents
Info
- Publication number
- JPS5013476U JPS5013476U JP6285273U JP6285273U JPS5013476U JP S5013476 U JPS5013476 U JP S5013476U JP 6285273 U JP6285273 U JP 6285273U JP 6285273 U JP6285273 U JP 6285273U JP S5013476 U JPS5013476 U JP S5013476U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285273U JPS5013476U (enExample) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285273U JPS5013476U (enExample) | 1973-05-30 | 1973-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5013476U true JPS5013476U (enExample) | 1975-02-12 |
Family
ID=28224689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6285273U Pending JPS5013476U (enExample) | 1973-05-30 | 1973-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5013476U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930875A (enExample) * | 1972-07-22 | 1974-03-19 | ||
| JPS5085074U (enExample) * | 1973-12-04 | 1975-07-21 | ||
| WO2018016066A1 (ja) * | 2016-07-22 | 2018-01-25 | ギガフォトン株式会社 | 狭帯域化ＫｒＦエキシマレーザ装置 |
-
1973
- 1973-05-30 JP JP6285273U patent/JPS5013476U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930875A (enExample) * | 1972-07-22 | 1974-03-19 | ||
| JPS5085074U (enExample) * | 1973-12-04 | 1975-07-21 | ||
| WO2018016066A1 (ja) * | 2016-07-22 | 2018-01-25 | ギガフォトン株式会社 | 狭帯域化ＫｒＦエキシマレーザ装置 |
| JPWO2018016066A1 (ja) * | 2016-07-22 | 2019-05-09 | ギガフォトン株式会社 | 狭帯域化ＫｒＦエキシマレーザ装置 |
| US10502623B2 (en) | 2016-07-22 | 2019-12-10 | Gigaphoton Inc. | Line-narrowed KrF excimer laser apparatus |