JPS50133510A - - Google Patents

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Publication number
JPS50133510A
JPS50133510A JP3993574A JP3993574A JPS50133510A JP S50133510 A JPS50133510 A JP S50133510A JP 3993574 A JP3993574 A JP 3993574A JP 3993574 A JP3993574 A JP 3993574A JP S50133510 A JPS50133510 A JP S50133510A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3993574A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3993574A priority Critical patent/JPS50133510A/ja
Publication of JPS50133510A publication Critical patent/JPS50133510A/ja
Pending legal-status Critical Current

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Landscapes

  • Structures Of Non-Positive Displacement Pumps (AREA)
JP3993574A 1974-04-10 1974-04-10 Pending JPS50133510A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3993574A JPS50133510A (enrdf_load_stackoverflow) 1974-04-10 1974-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3993574A JPS50133510A (enrdf_load_stackoverflow) 1974-04-10 1974-04-10

Publications (1)

Publication Number Publication Date
JPS50133510A true JPS50133510A (enrdf_load_stackoverflow) 1975-10-22

Family

ID=12566789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3993574A Pending JPS50133510A (enrdf_load_stackoverflow) 1974-04-10 1974-04-10

Country Status (1)

Country Link
JP (1) JPS50133510A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474910U (enrdf_load_stackoverflow) * 1977-11-08 1979-05-28
JPS5474909U (enrdf_load_stackoverflow) * 1977-11-08 1979-05-28
JPH03182697A (ja) * 1989-12-12 1991-08-08 Mitsubishi Heavy Ind Ltd 真空ポンプ
JP2012527568A (ja) * 2009-05-20 2012-11-08 エドワーズ リミテッド 軸方向気体ベアリングを備えたサイドチャネル型ポンプ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474910U (enrdf_load_stackoverflow) * 1977-11-08 1979-05-28
JPS5474909U (enrdf_load_stackoverflow) * 1977-11-08 1979-05-28
JPH03182697A (ja) * 1989-12-12 1991-08-08 Mitsubishi Heavy Ind Ltd 真空ポンプ
JP2012527568A (ja) * 2009-05-20 2012-11-08 エドワーズ リミテッド 軸方向気体ベアリングを備えたサイドチャネル型ポンプ
US9086071B2 (en) 2009-05-20 2015-07-21 Edwards Limited Side-channel pump with axial gas bearing
US9127685B2 (en) 2009-05-20 2015-09-08 Edwards Limited Regenerative vacuum pump with axial thrust balancing means
US9334873B2 (en) 2009-05-20 2016-05-10 Edwards Limited Side-channel compressor with symmetric rotor disc which pumps in parallel

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