JPS50133176A - - Google Patents

Info

Publication number
JPS50133176A
JPS50133176A JP4053974A JP4053974A JPS50133176A JP S50133176 A JPS50133176 A JP S50133176A JP 4053974 A JP4053974 A JP 4053974A JP 4053974 A JP4053974 A JP 4053974A JP S50133176 A JPS50133176 A JP S50133176A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4053974A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4053974A priority Critical patent/JPS50133176A/ja
Publication of JPS50133176A publication Critical patent/JPS50133176A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4053974A 1974-04-09 1974-04-09 Pending JPS50133176A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4053974A JPS50133176A (enrdf_load_stackoverflow) 1974-04-09 1974-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4053974A JPS50133176A (enrdf_load_stackoverflow) 1974-04-09 1974-04-09

Publications (1)

Publication Number Publication Date
JPS50133176A true JPS50133176A (enrdf_load_stackoverflow) 1975-10-22

Family

ID=12583246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4053974A Pending JPS50133176A (enrdf_load_stackoverflow) 1974-04-09 1974-04-09

Country Status (1)

Country Link
JP (1) JPS50133176A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5265183A (en) * 1975-11-26 1977-05-30 Matsushita Electric Ind Co Ltd Production process of thin film of compounds
WO1987005637A1 (en) * 1986-03-12 1987-09-24 Tobi Co., Ltd. Continuous ion plating device for rapidly moving film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932861A (enrdf_load_stackoverflow) * 1972-07-19 1974-03-26
JPS4961031A (enrdf_load_stackoverflow) * 1972-10-17 1974-06-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932861A (enrdf_load_stackoverflow) * 1972-07-19 1974-03-26
JPS4961031A (enrdf_load_stackoverflow) * 1972-10-17 1974-06-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5265183A (en) * 1975-11-26 1977-05-30 Matsushita Electric Ind Co Ltd Production process of thin film of compounds
WO1987005637A1 (en) * 1986-03-12 1987-09-24 Tobi Co., Ltd. Continuous ion plating device for rapidly moving film

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