JPS50132980A - - Google Patents

Info

Publication number
JPS50132980A
JPS50132980A JP3799874A JP3799874A JPS50132980A JP S50132980 A JPS50132980 A JP S50132980A JP 3799874 A JP3799874 A JP 3799874A JP 3799874 A JP3799874 A JP 3799874A JP S50132980 A JPS50132980 A JP S50132980A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3799874A
Other languages
Japanese (ja)
Other versions
JPS5244232B2 (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3799874A priority Critical patent/JPS5244232B2/ja
Publication of JPS50132980A publication Critical patent/JPS50132980A/ja
Publication of JPS5244232B2 publication Critical patent/JPS5244232B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3799874A 1974-04-05 1974-04-05 Expired JPS5244232B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3799874A JPS5244232B2 (xx) 1974-04-05 1974-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3799874A JPS5244232B2 (xx) 1974-04-05 1974-04-05

Publications (2)

Publication Number Publication Date
JPS50132980A true JPS50132980A (xx) 1975-10-21
JPS5244232B2 JPS5244232B2 (xx) 1977-11-05

Family

ID=12513232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3799874A Expired JPS5244232B2 (xx) 1974-04-05 1974-04-05

Country Status (1)

Country Link
JP (1) JPS5244232B2 (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法

Also Published As

Publication number Publication date
JPS5244232B2 (xx) 1977-11-05

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