JPS501313Y1 - - Google Patents
Info
- Publication number
- JPS501313Y1 JPS501313Y1 JP1970103470U JP10347070U JPS501313Y1 JP S501313 Y1 JPS501313 Y1 JP S501313Y1 JP 1970103470 U JP1970103470 U JP 1970103470U JP 10347070 U JP10347070 U JP 10347070U JP S501313 Y1 JPS501313 Y1 JP S501313Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1970103470U JPS501313Y1 (ja) | 1970-10-19 | 1970-10-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1970103470U JPS501313Y1 (ja) | 1970-10-19 | 1970-10-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS501313Y1 true JPS501313Y1 (ja) | 1975-01-14 |
Family
ID=33265040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1970103470U Expired JPS501313Y1 (ja) | 1970-10-19 | 1970-10-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS501313Y1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001091970A1 (fr) * | 2000-05-31 | 2001-12-06 | Sumitomo Mitsubishi Silicon Corporation | Procede de polissage de tranches de semiconducteurs avec un polisseur double-face |
-
1970
- 1970-10-19 JP JP1970103470U patent/JPS501313Y1/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001091970A1 (fr) * | 2000-05-31 | 2001-12-06 | Sumitomo Mitsubishi Silicon Corporation | Procede de polissage de tranches de semiconducteurs avec un polisseur double-face |
US7470169B2 (en) | 2000-05-31 | 2008-12-30 | Sumitomo Mitsubishi Silicon Corporation | Method of polishing semiconductor wafers by using double-sided polisher |