JPS50128688A - - Google Patents

Info

Publication number
JPS50128688A
JPS50128688A JP3630274A JP3630274A JPS50128688A JP S50128688 A JPS50128688 A JP S50128688A JP 3630274 A JP3630274 A JP 3630274A JP 3630274 A JP3630274 A JP 3630274A JP S50128688 A JPS50128688 A JP S50128688A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3630274A
Other languages
Japanese (ja)
Other versions
JPS5732105B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3630274A priority Critical patent/JPS5732105B2/ja
Publication of JPS50128688A publication Critical patent/JPS50128688A/ja
Publication of JPS5732105B2 publication Critical patent/JPS5732105B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3630274A 1974-03-29 1974-03-29 Expired JPS5732105B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3630274A JPS5732105B2 (cg-RX-API-DMAC10.html) 1974-03-29 1974-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3630274A JPS5732105B2 (cg-RX-API-DMAC10.html) 1974-03-29 1974-03-29

Publications (2)

Publication Number Publication Date
JPS50128688A true JPS50128688A (cg-RX-API-DMAC10.html) 1975-10-09
JPS5732105B2 JPS5732105B2 (cg-RX-API-DMAC10.html) 1982-07-08

Family

ID=12466011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3630274A Expired JPS5732105B2 (cg-RX-API-DMAC10.html) 1974-03-29 1974-03-29

Country Status (1)

Country Link
JP (1) JPS5732105B2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (cg-RX-API-DMAC10.html) * 1972-07-29 1974-03-28
JPS5062181A (cg-RX-API-DMAC10.html) * 1973-10-05 1975-05-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (cg-RX-API-DMAC10.html) * 1972-07-29 1974-03-28
JPS5062181A (cg-RX-API-DMAC10.html) * 1973-10-05 1975-05-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object

Also Published As

Publication number Publication date
JPS5732105B2 (cg-RX-API-DMAC10.html) 1982-07-08

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