JPS50128501A - - Google Patents
Info
- Publication number
- JPS50128501A JPS50128501A JP50028914A JP2891475A JPS50128501A JP S50128501 A JPS50128501 A JP S50128501A JP 50028914 A JP50028914 A JP 50028914A JP 2891475 A JP2891475 A JP 2891475A JP S50128501 A JPS50128501 A JP S50128501A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US450049A US3899832A (en) | 1974-03-11 | 1974-03-11 | Phonograph record profile tracer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50128501A true JPS50128501A (ja) | 1975-10-09 |
Family
ID=23786562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50028914A Pending JPS50128501A (ja) | 1974-03-11 | 1975-03-10 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3899832A (ja) |
| JP (1) | JPS50128501A (ja) |
| DE (1) | DE2510065C3 (ja) |
| SE (1) | SE397423B (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2807297C3 (de) * | 1978-02-21 | 1982-02-11 | MTU Motoren- und Turbinen-Union München GmbH, 8000 München | Einrichtung zur elektromechanischen Axialspielmessung |
| US4860229A (en) * | 1984-01-20 | 1989-08-22 | Ade Corporation | Wafer flatness station |
| SE8405220L (sv) * | 1984-10-19 | 1986-02-17 | Bofors Ab | Sett och anordning for kalibrering av lengdindikatorer |
| US4849916A (en) * | 1985-04-30 | 1989-07-18 | Ade Corporation | Improved spatial resolution measurement system and method |
| US4750141A (en) * | 1985-11-26 | 1988-06-07 | Ade Corporation | Method and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing same |
| GB2276009B (en) * | 1990-04-17 | 1995-01-04 | Logitech Ltd | Monitoring and control of surface curvature |
| KR100562503B1 (ko) * | 2003-07-07 | 2006-03-21 | 삼성전자주식회사 | 반도체 척의 수평을 측정하기 위한 장치 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3750294A (en) * | 1971-06-18 | 1973-08-07 | Caterpillar Tractor Co | Floating thickness monitor |
-
1974
- 1974-03-11 US US450049A patent/US3899832A/en not_active Expired - Lifetime
-
1975
- 1975-03-07 DE DE2510065A patent/DE2510065C3/de not_active Expired
- 1975-03-10 JP JP50028914A patent/JPS50128501A/ja active Pending
- 1975-03-10 SE SE7502645-0A patent/SE397423B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE2510065C3 (de) | 1980-04-03 |
| SE7502645L (ja) | 1975-09-12 |
| US3899832A (en) | 1975-08-19 |
| DE2510065B2 (de) | 1979-07-26 |
| SE397423B (sv) | 1977-10-31 |
| DE2510065A1 (de) | 1975-09-18 |