JPS50128469A - - Google Patents

Info

Publication number
JPS50128469A
JPS50128469A JP49034225A JP3422574A JPS50128469A JP S50128469 A JPS50128469 A JP S50128469A JP 49034225 A JP49034225 A JP 49034225A JP 3422574 A JP3422574 A JP 3422574A JP S50128469 A JPS50128469 A JP S50128469A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49034225A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49034225A priority Critical patent/JPS50128469A/ja
Publication of JPS50128469A publication Critical patent/JPS50128469A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP49034225A 1974-03-27 1974-03-27 Pending JPS50128469A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49034225A JPS50128469A (ko) 1974-03-27 1974-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49034225A JPS50128469A (ko) 1974-03-27 1974-03-27

Publications (1)

Publication Number Publication Date
JPS50128469A true JPS50128469A (ko) 1975-10-09

Family

ID=12408191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49034225A Pending JPS50128469A (ko) 1974-03-27 1974-03-27

Country Status (1)

Country Link
JP (1) JPS50128469A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215026A (ja) * 1982-06-08 1983-12-14 Fujitsu Ltd フオト・レジストパタ−ンの形成方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852479A (ko) * 1971-11-05 1973-07-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852479A (ko) * 1971-11-05 1973-07-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215026A (ja) * 1982-06-08 1983-12-14 Fujitsu Ltd フオト・レジストパタ−ンの形成方法
JPS6253937B2 (ko) * 1982-06-08 1987-11-12 Fujitsu Ltd

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