JPS50128469A - - Google Patents
Info
- Publication number
- JPS50128469A JPS50128469A JP49034225A JP3422574A JPS50128469A JP S50128469 A JPS50128469 A JP S50128469A JP 49034225 A JP49034225 A JP 49034225A JP 3422574 A JP3422574 A JP 3422574A JP S50128469 A JPS50128469 A JP S50128469A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49034225A JPS50128469A (en) | 1974-03-27 | 1974-03-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49034225A JPS50128469A (en) | 1974-03-27 | 1974-03-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS50128469A true JPS50128469A (en) | 1975-10-09 |
Family
ID=12408191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49034225A Pending JPS50128469A (en) | 1974-03-27 | 1974-03-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS50128469A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58215026A (en) * | 1982-06-08 | 1983-12-14 | Fujitsu Ltd | Formation of photo resist pattern |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852479A (en) * | 1971-11-05 | 1973-07-23 |
-
1974
- 1974-03-27 JP JP49034225A patent/JPS50128469A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852479A (en) * | 1971-11-05 | 1973-07-23 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58215026A (en) * | 1982-06-08 | 1983-12-14 | Fujitsu Ltd | Formation of photo resist pattern |
JPS6253937B2 (en) * | 1982-06-08 | 1987-11-12 | Fujitsu Ltd |