JPS50126170A - - Google Patents
Info
- Publication number
- JPS50126170A JPS50126170A JP3303174A JP3303174A JPS50126170A JP S50126170 A JPS50126170 A JP S50126170A JP 3303174 A JP3303174 A JP 3303174A JP 3303174 A JP3303174 A JP 3303174A JP S50126170 A JPS50126170 A JP S50126170A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3303174A JPS531182B2 (no) | 1974-03-23 | 1974-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3303174A JPS531182B2 (no) | 1974-03-23 | 1974-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50126170A true JPS50126170A (no) | 1975-10-03 |
| JPS531182B2 JPS531182B2 (no) | 1978-01-17 |
Family
ID=12375411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3303174A Expired JPS531182B2 (no) | 1974-03-23 | 1974-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS531182B2 (no) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5599738A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Automatic conveying equipment for wafer |
| JPS57157536A (en) * | 1981-03-24 | 1982-09-29 | Nec Kyushu Ltd | Manufacturing device for semiconductor substrate |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58111131U (ja) * | 1982-01-19 | 1983-07-29 | アイダエンジニアリング株式会社 | プレス供給材料の異常検出装置 |
-
1974
- 1974-03-23 JP JP3303174A patent/JPS531182B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5599738A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Automatic conveying equipment for wafer |
| JPS57157536A (en) * | 1981-03-24 | 1982-09-29 | Nec Kyushu Ltd | Manufacturing device for semiconductor substrate |
| JPS6226586B2 (no) * | 1981-03-24 | 1987-06-09 | Kyushu Nippon Electric |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS531182B2 (no) | 1978-01-17 |