JPS50125972A - - Google Patents
Info
- Publication number
- JPS50125972A JPS50125972A JP3216574A JP3216574A JPS50125972A JP S50125972 A JPS50125972 A JP S50125972A JP 3216574 A JP3216574 A JP 3216574A JP 3216574 A JP3216574 A JP 3216574A JP S50125972 A JPS50125972 A JP S50125972A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3216574A JPS532623B2 (en:Method) | 1974-03-19 | 1974-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3216574A JPS532623B2 (en:Method) | 1974-03-19 | 1974-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50125972A true JPS50125972A (en:Method) | 1975-10-03 |
| JPS532623B2 JPS532623B2 (en:Method) | 1978-01-30 |
Family
ID=12351316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3216574A Expired JPS532623B2 (en:Method) | 1974-03-19 | 1974-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS532623B2 (en:Method) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS531350A (en) * | 1976-06-28 | 1978-01-09 | Seitetsu Kagaku Co Ltd | Rapid cooling tower |
| JPS53142405A (en) * | 1977-05-18 | 1978-12-12 | Nippon Mining Co Ltd | Prevention of blocking of cracked hydrocarbon cooler |
| JPS57205258U (en:Method) * | 1981-06-19 | 1982-12-27 | ||
| US7695700B2 (en) | 1996-12-31 | 2010-04-13 | Applied Materials, Inc. | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
-
1974
- 1974-03-19 JP JP3216574A patent/JPS532623B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS531350A (en) * | 1976-06-28 | 1978-01-09 | Seitetsu Kagaku Co Ltd | Rapid cooling tower |
| JPS53142405A (en) * | 1977-05-18 | 1978-12-12 | Nippon Mining Co Ltd | Prevention of blocking of cracked hydrocarbon cooler |
| JPS57205258U (en:Method) * | 1981-06-19 | 1982-12-27 | ||
| US7695700B2 (en) | 1996-12-31 | 2010-04-13 | Applied Materials, Inc. | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS532623B2 (en:Method) | 1978-01-30 |