JPS50125972A - - Google Patents

Info

Publication number
JPS50125972A
JPS50125972A JP3216574A JP3216574A JPS50125972A JP S50125972 A JPS50125972 A JP S50125972A JP 3216574 A JP3216574 A JP 3216574A JP 3216574 A JP3216574 A JP 3216574A JP S50125972 A JPS50125972 A JP S50125972A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3216574A
Other languages
Japanese (ja)
Other versions
JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3216574A priority Critical patent/JPS532623B2/ja
Publication of JPS50125972A publication Critical patent/JPS50125972A/ja
Publication of JPS532623B2 publication Critical patent/JPS532623B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP3216574A 1974-03-19 1974-03-19 Expired JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3216574A JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-19 1974-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3216574A JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-19 1974-03-19

Publications (2)

Publication Number Publication Date
JPS50125972A true JPS50125972A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-10-03
JPS532623B2 JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-01-30

Family

ID=12351316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3216574A Expired JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-19 1974-03-19

Country Status (1)

Country Link
JP (1) JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS531350A (en) * 1976-06-28 1978-01-09 Seitetsu Kagaku Co Ltd Rapid cooling tower
JPS53142405A (en) * 1977-05-18 1978-12-12 Nippon Mining Co Ltd Prevention of blocking of cracked hydrocarbon cooler
JPS57205258U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-06-19 1982-12-27
US7695700B2 (en) 1996-12-31 2010-04-13 Applied Materials, Inc. Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS531350A (en) * 1976-06-28 1978-01-09 Seitetsu Kagaku Co Ltd Rapid cooling tower
JPS53142405A (en) * 1977-05-18 1978-12-12 Nippon Mining Co Ltd Prevention of blocking of cracked hydrocarbon cooler
JPS57205258U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-06-19 1982-12-27
US7695700B2 (en) 1996-12-31 2010-04-13 Applied Materials, Inc. Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases

Also Published As

Publication number Publication date
JPS532623B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-01-30

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