JPS50123085A - - Google Patents
Info
- Publication number
- JPS50123085A JPS50123085A JP3011574A JP3011574A JPS50123085A JP S50123085 A JPS50123085 A JP S50123085A JP 3011574 A JP3011574 A JP 3011574A JP 3011574 A JP3011574 A JP 3011574A JP S50123085 A JPS50123085 A JP S50123085A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3011574A JPS50123085A (en) | 1974-03-18 | 1974-03-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3011574A JPS50123085A (en) | 1974-03-18 | 1974-03-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS50123085A true JPS50123085A (en) | 1975-09-27 |
Family
ID=12294771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3011574A Pending JPS50123085A (en) | 1974-03-18 | 1974-03-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS50123085A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS529642U (en) * | 1975-07-09 | 1977-01-22 | ||
JPS5528334A (en) * | 1978-08-16 | 1980-02-28 | Matsushita Electric Ind Co Ltd | Manufacturing apparatus for ultrafine particle |
JPS58177464A (en) * | 1982-04-13 | 1983-10-18 | Canon Inc | Vacuum deposition method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4718450U (en) * | 1971-03-31 | 1972-11-01 | ||
JPS497172A (en) * | 1972-05-12 | 1974-01-22 |
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1974
- 1974-03-18 JP JP3011574A patent/JPS50123085A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4718450U (en) * | 1971-03-31 | 1972-11-01 | ||
JPS497172A (en) * | 1972-05-12 | 1974-01-22 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS529642U (en) * | 1975-07-09 | 1977-01-22 | ||
JPS5528334A (en) * | 1978-08-16 | 1980-02-28 | Matsushita Electric Ind Co Ltd | Manufacturing apparatus for ultrafine particle |
JPS58177464A (en) * | 1982-04-13 | 1983-10-18 | Canon Inc | Vacuum deposition method |