JPS50123085A - - Google Patents

Info

Publication number
JPS50123085A
JPS50123085A JP3011574A JP3011574A JPS50123085A JP S50123085 A JPS50123085 A JP S50123085A JP 3011574 A JP3011574 A JP 3011574A JP 3011574 A JP3011574 A JP 3011574A JP S50123085 A JPS50123085 A JP S50123085A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3011574A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3011574A priority Critical patent/JPS50123085A/ja
Publication of JPS50123085A publication Critical patent/JPS50123085A/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP3011574A 1974-03-18 1974-03-18 Pending JPS50123085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3011574A JPS50123085A (en) 1974-03-18 1974-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3011574A JPS50123085A (en) 1974-03-18 1974-03-18

Publications (1)

Publication Number Publication Date
JPS50123085A true JPS50123085A (en) 1975-09-27

Family

ID=12294771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3011574A Pending JPS50123085A (en) 1974-03-18 1974-03-18

Country Status (1)

Country Link
JP (1) JPS50123085A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529642U (en) * 1975-07-09 1977-01-22
JPS5528334A (en) * 1978-08-16 1980-02-28 Matsushita Electric Ind Co Ltd Manufacturing apparatus for ultrafine particle
JPS58177464A (en) * 1982-04-13 1983-10-18 Canon Inc Vacuum deposition method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718450U (en) * 1971-03-31 1972-11-01
JPS497172A (en) * 1972-05-12 1974-01-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718450U (en) * 1971-03-31 1972-11-01
JPS497172A (en) * 1972-05-12 1974-01-22

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529642U (en) * 1975-07-09 1977-01-22
JPS5528334A (en) * 1978-08-16 1980-02-28 Matsushita Electric Ind Co Ltd Manufacturing apparatus for ultrafine particle
JPS58177464A (en) * 1982-04-13 1983-10-18 Canon Inc Vacuum deposition method

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