JPS50122880A - - Google Patents
Info
- Publication number
- JPS50122880A JPS50122880A JP49029357A JP2935774A JPS50122880A JP S50122880 A JPS50122880 A JP S50122880A JP 49029357 A JP49029357 A JP 49029357A JP 2935774 A JP2935774 A JP 2935774A JP S50122880 A JPS50122880 A JP S50122880A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Image Processing (AREA)
- Wire Bonding (AREA)
- Control Of Position Or Direction (AREA)
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2935774A JPS5730295B2 (en) | 1974-03-13 | 1974-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2935774A JPS5730295B2 (en) | 1974-03-13 | 1974-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50122880A true JPS50122880A (en) | 1975-09-26 |
| JPS5730295B2 JPS5730295B2 (en) | 1982-06-28 |
Family
ID=12273935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2935774A Expired JPS5730295B2 (en) | 1974-03-13 | 1974-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5730295B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364180A (en) * | 1976-11-19 | 1978-06-08 | Sanyo Electric Co | Device for correcting position |
| JPS57145066U (en) * | 1981-03-06 | 1982-09-11 | ||
| JPS60214910A (en) * | 1985-03-11 | 1985-10-28 | 株式会社日立製作所 | Dicing device |
| JPS6235640A (en) * | 1985-08-09 | 1987-02-16 | Nec Kyushu Ltd | Pre-alignment mechanism for semiconductor substrate |
| JP2007218778A (en) * | 2006-02-17 | 2007-08-30 | Yamatake Corp | Position detection method and alignment method |
| JP2008082748A (en) * | 2006-09-26 | 2008-04-10 | Yamatake Corp | Edge sensor, position detection method, and alignment method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0249990U (en) * | 1988-09-29 | 1990-04-06 |
-
1974
- 1974-03-13 JP JP2935774A patent/JPS5730295B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364180A (en) * | 1976-11-19 | 1978-06-08 | Sanyo Electric Co | Device for correcting position |
| JPS57145066U (en) * | 1981-03-06 | 1982-09-11 | ||
| JPS60214910A (en) * | 1985-03-11 | 1985-10-28 | 株式会社日立製作所 | Dicing device |
| JPS6235640A (en) * | 1985-08-09 | 1987-02-16 | Nec Kyushu Ltd | Pre-alignment mechanism for semiconductor substrate |
| JPH0334215B2 (en) * | 1985-08-09 | 1991-05-21 | Kyushu Nippon Electric | |
| JP2007218778A (en) * | 2006-02-17 | 2007-08-30 | Yamatake Corp | Position detection method and alignment method |
| JP2008082748A (en) * | 2006-09-26 | 2008-04-10 | Yamatake Corp | Edge sensor, position detection method, and alignment method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5730295B2 (en) | 1982-06-28 |