JPS50122172A - - Google Patents

Info

Publication number
JPS50122172A
JPS50122172A JP2840974A JP2840974A JPS50122172A JP S50122172 A JPS50122172 A JP S50122172A JP 2840974 A JP2840974 A JP 2840974A JP 2840974 A JP2840974 A JP 2840974A JP S50122172 A JPS50122172 A JP S50122172A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2840974A
Other versions
JPS5422870B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2840974A priority Critical patent/JPS5422870B2/ja
Publication of JPS50122172A publication Critical patent/JPS50122172A/ja
Publication of JPS5422870B2 publication Critical patent/JPS5422870B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2840974A 1974-03-12 1974-03-12 Expired JPS5422870B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2840974A JPS5422870B2 (ja) 1974-03-12 1974-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2840974A JPS5422870B2 (ja) 1974-03-12 1974-03-12

Publications (2)

Publication Number Publication Date
JPS50122172A true JPS50122172A (ja) 1975-09-25
JPS5422870B2 JPS5422870B2 (ja) 1979-08-09

Family

ID=12247846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2840974A Expired JPS5422870B2 (ja) 1974-03-12 1974-03-12

Country Status (1)

Country Link
JP (1) JPS5422870B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5469061A (en) * 1977-11-11 1979-06-02 Mitsubishi Electric Corp Heat processor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630369Y2 (ja) * 1978-02-01 1981-07-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332167Y1 (ja) * 1966-09-29 1968-12-27
JPS497264U (ja) * 1972-05-02 1974-01-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332167Y1 (ja) * 1966-09-29 1968-12-27
JPS497264U (ja) * 1972-05-02 1974-01-22

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5469061A (en) * 1977-11-11 1979-06-02 Mitsubishi Electric Corp Heat processor
JPS5823926B2 (ja) * 1977-11-11 1983-05-18 三菱電機株式会社 熱処理装置

Also Published As

Publication number Publication date
JPS5422870B2 (ja) 1979-08-09

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