JPS50121760U - - Google Patents

Info

Publication number
JPS50121760U
JPS50121760U JP3111574U JP3111574U JPS50121760U JP S50121760 U JPS50121760 U JP S50121760U JP 3111574 U JP3111574 U JP 3111574U JP 3111574 U JP3111574 U JP 3111574U JP S50121760 U JPS50121760 U JP S50121760U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3111574U
Other languages
Japanese (ja)
Other versions
JPS5253462Y2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974031115U priority Critical patent/JPS5253462Y2/ja
Publication of JPS50121760U publication Critical patent/JPS50121760U/ja
Application granted granted Critical
Publication of JPS5253462Y2 publication Critical patent/JPS5253462Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Indicating Measured Values (AREA)
JP1974031115U 1974-03-18 1974-03-18 Expired JPS5253462Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974031115U JPS5253462Y2 (fi) 1974-03-18 1974-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974031115U JPS5253462Y2 (fi) 1974-03-18 1974-03-18

Publications (2)

Publication Number Publication Date
JPS50121760U true JPS50121760U (fi) 1975-10-04
JPS5253462Y2 JPS5253462Y2 (fi) 1977-12-05

Family

ID=28139809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974031115U Expired JPS5253462Y2 (fi) 1974-03-18 1974-03-18

Country Status (1)

Country Link
JP (1) JPS5253462Y2 (fi)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system

Also Published As

Publication number Publication date
JPS5253462Y2 (fi) 1977-12-05

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