JPS50121760U - - Google Patents

Info

Publication number
JPS50121760U
JPS50121760U JP3111574U JP3111574U JPS50121760U JP S50121760 U JPS50121760 U JP S50121760U JP 3111574 U JP3111574 U JP 3111574U JP 3111574 U JP3111574 U JP 3111574U JP S50121760 U JPS50121760 U JP S50121760U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3111574U
Other languages
Japanese (ja)
Other versions
JPS5253462Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974031115U priority Critical patent/JPS5253462Y2/ja
Publication of JPS50121760U publication Critical patent/JPS50121760U/ja
Application granted granted Critical
Publication of JPS5253462Y2 publication Critical patent/JPS5253462Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Indicating Measured Values (AREA)
  • Optical Transform (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP1974031115U 1974-03-18 1974-03-18 Expired JPS5253462Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974031115U JPS5253462Y2 (cg-RX-API-DMAC7.html) 1974-03-18 1974-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974031115U JPS5253462Y2 (cg-RX-API-DMAC7.html) 1974-03-18 1974-03-18

Publications (2)

Publication Number Publication Date
JPS50121760U true JPS50121760U (cg-RX-API-DMAC7.html) 1975-10-04
JPS5253462Y2 JPS5253462Y2 (cg-RX-API-DMAC7.html) 1977-12-05

Family

ID=28139809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974031115U Expired JPS5253462Y2 (cg-RX-API-DMAC7.html) 1974-03-18 1974-03-18

Country Status (1)

Country Link
JP (1) JPS5253462Y2 (cg-RX-API-DMAC7.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system

Also Published As

Publication number Publication date
JPS5253462Y2 (cg-RX-API-DMAC7.html) 1977-12-05

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