JPS50120765A - - Google Patents
Info
- Publication number
- JPS50120765A JPS50120765A JP49026382A JP2638274A JPS50120765A JP S50120765 A JPS50120765 A JP S50120765A JP 49026382 A JP49026382 A JP 49026382A JP 2638274 A JP2638274 A JP 2638274A JP S50120765 A JPS50120765 A JP S50120765A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49026382A JPS50120765A (en) | 1974-03-08 | 1974-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49026382A JPS50120765A (en) | 1974-03-08 | 1974-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50120765A true JPS50120765A (en) | 1975-09-22 |
Family
ID=12191962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49026382A Pending JPS50120765A (en) | 1974-03-08 | 1974-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50120765A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003257330A (en) * | 2002-03-06 | 2003-09-12 | Jeol Ltd | Converged ion beam device |
| WO2010146833A1 (en) * | 2009-06-16 | 2010-12-23 | 株式会社日立ハイテクノロジーズ | Charged particle radiation device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4833769A (en) * | 1971-09-03 | 1973-05-12 |
-
1974
- 1974-03-08 JP JP49026382A patent/JPS50120765A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4833769A (en) * | 1971-09-03 | 1973-05-12 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003257330A (en) * | 2002-03-06 | 2003-09-12 | Jeol Ltd | Converged ion beam device |
| WO2010146833A1 (en) * | 2009-06-16 | 2010-12-23 | 株式会社日立ハイテクノロジーズ | Charged particle radiation device |
| US8426835B2 (en) | 2009-06-16 | 2013-04-23 | Hitachi High-Technologies Corporation | Charged particle radiation device |
| JP5406293B2 (en) * | 2009-06-16 | 2014-02-05 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |