JPS50120765A - - Google Patents

Info

Publication number
JPS50120765A
JPS50120765A JP49026382A JP2638274A JPS50120765A JP S50120765 A JPS50120765 A JP S50120765A JP 49026382 A JP49026382 A JP 49026382A JP 2638274 A JP2638274 A JP 2638274A JP S50120765 A JPS50120765 A JP S50120765A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49026382A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49026382A priority Critical patent/JPS50120765A/ja
Publication of JPS50120765A publication Critical patent/JPS50120765A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP49026382A 1974-03-08 1974-03-08 Pending JPS50120765A (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49026382A JPS50120765A (US07922777-20110412-C00004.png) 1974-03-08 1974-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49026382A JPS50120765A (US07922777-20110412-C00004.png) 1974-03-08 1974-03-08

Publications (1)

Publication Number Publication Date
JPS50120765A true JPS50120765A (US07922777-20110412-C00004.png) 1975-09-22

Family

ID=12191962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49026382A Pending JPS50120765A (US07922777-20110412-C00004.png) 1974-03-08 1974-03-08

Country Status (1)

Country Link
JP (1) JPS50120765A (US07922777-20110412-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003257330A (ja) * 2002-03-06 2003-09-12 Jeol Ltd 集束イオンビーム装置
WO2010146833A1 (ja) * 2009-06-16 2010-12-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833769A (US07922777-20110412-C00004.png) * 1971-09-03 1973-05-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833769A (US07922777-20110412-C00004.png) * 1971-09-03 1973-05-12

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003257330A (ja) * 2002-03-06 2003-09-12 Jeol Ltd 集束イオンビーム装置
WO2010146833A1 (ja) * 2009-06-16 2010-12-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US8426835B2 (en) 2009-06-16 2013-04-23 Hitachi High-Technologies Corporation Charged particle radiation device
JP5406293B2 (ja) * 2009-06-16 2014-02-05 株式会社日立ハイテクノロジーズ 荷電粒子線装置

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