JPS50120280A - - Google Patents
Info
- Publication number
- JPS50120280A JPS50120280A JP2593974A JP2593974A JPS50120280A JP S50120280 A JPS50120280 A JP S50120280A JP 2593974 A JP2593974 A JP 2593974A JP 2593974 A JP2593974 A JP 2593974A JP S50120280 A JPS50120280 A JP S50120280A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2593974A JPS5246798B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-05 | 1974-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2593974A JPS5246798B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-05 | 1974-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50120280A true JPS50120280A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-09-20 |
| JPS5246798B2 JPS5246798B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-11-28 |
Family
ID=12179717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2593974A Expired JPS5246798B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-05 | 1974-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5246798B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59172739A (ja) * | 1983-03-22 | 1984-09-29 | Toko Inc | 半導体集積回路装置とその製造方法 |
| JPS6094738A (ja) * | 1983-10-28 | 1985-05-27 | Matsushita Electric Works Ltd | 半導体基板 |
| JPH02119263A (ja) * | 1988-10-28 | 1990-05-07 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| JPH0521460A (ja) * | 1990-12-25 | 1993-01-29 | Semiconductor Energy Lab Co Ltd | 半導体装置作製方法 |
| US6838698B1 (en) | 1990-12-25 | 2005-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having source/channel or drain/channel boundary regions |
| US7253437B2 (en) | 1990-12-25 | 2007-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device having a thin film transistor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0283484U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-12-16 | 1990-06-28 |
-
1974
- 1974-03-05 JP JP2593974A patent/JPS5246798B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59172739A (ja) * | 1983-03-22 | 1984-09-29 | Toko Inc | 半導体集積回路装置とその製造方法 |
| JPS6094738A (ja) * | 1983-10-28 | 1985-05-27 | Matsushita Electric Works Ltd | 半導体基板 |
| JPH02119263A (ja) * | 1988-10-28 | 1990-05-07 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| JPH0521460A (ja) * | 1990-12-25 | 1993-01-29 | Semiconductor Energy Lab Co Ltd | 半導体装置作製方法 |
| US6838698B1 (en) | 1990-12-25 | 2005-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having source/channel or drain/channel boundary regions |
| US7253437B2 (en) | 1990-12-25 | 2007-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device having a thin film transistor |
| US7375375B2 (en) | 1990-12-25 | 2008-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for forming the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5246798B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-11-28 |