JPS50120268A - - Google Patents
Info
- Publication number
- JPS50120268A JPS50120268A JP2525674A JP2525674A JPS50120268A JP S50120268 A JPS50120268 A JP S50120268A JP 2525674 A JP2525674 A JP 2525674A JP 2525674 A JP2525674 A JP 2525674A JP S50120268 A JPS50120268 A JP S50120268A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2525674A JPS50120268A (nl) | 1974-03-06 | 1974-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2525674A JPS50120268A (nl) | 1974-03-06 | 1974-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50120268A true JPS50120268A (nl) | 1975-09-20 |
Family
ID=12160920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2525674A Pending JPS50120268A (nl) | 1974-03-06 | 1974-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50120268A (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102037541A (zh) * | 2008-05-30 | 2011-04-27 | 飞科公司 | 用于干燥已分离的电子元件的装置和方法 |
| JP2013169474A (ja) * | 2012-02-17 | 2013-09-02 | Mitsubishi Electric Corp | 異物除去方法、異物除去装置 |
-
1974
- 1974-03-06 JP JP2525674A patent/JPS50120268A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102037541A (zh) * | 2008-05-30 | 2011-04-27 | 飞科公司 | 用于干燥已分离的电子元件的装置和方法 |
| JP2013169474A (ja) * | 2012-02-17 | 2013-09-02 | Mitsubishi Electric Corp | 異物除去方法、異物除去装置 |