JPS50118670A - - Google Patents
Info
- Publication number
- JPS50118670A JPS50118670A JP2330474A JP2330474A JPS50118670A JP S50118670 A JPS50118670 A JP S50118670A JP 2330474 A JP2330474 A JP 2330474A JP 2330474 A JP2330474 A JP 2330474A JP S50118670 A JPS50118670 A JP S50118670A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2330474A JPS50118670A (sv) | 1974-03-01 | 1974-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2330474A JPS50118670A (sv) | 1974-03-01 | 1974-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50118670A true JPS50118670A (sv) | 1975-09-17 |
Family
ID=12106855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2330474A Pending JPS50118670A (sv) | 1974-03-01 | 1974-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50118670A (sv) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5575344U (sv) * | 1978-11-20 | 1980-05-24 | ||
| JPS6127626A (ja) * | 1984-07-18 | 1986-02-07 | Deisuko Saiyaa Japan:Kk | 半導体ウエハの熱処理方法及びこれに使用するウエハ支持具 |
| JPS6211224A (ja) * | 1986-07-18 | 1987-01-20 | Hitachi Ltd | 半導体ウエハの熱処理方法 |
-
1974
- 1974-03-01 JP JP2330474A patent/JPS50118670A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5575344U (sv) * | 1978-11-20 | 1980-05-24 | ||
| JPS6127626A (ja) * | 1984-07-18 | 1986-02-07 | Deisuko Saiyaa Japan:Kk | 半導体ウエハの熱処理方法及びこれに使用するウエハ支持具 |
| JPS6211224A (ja) * | 1986-07-18 | 1987-01-20 | Hitachi Ltd | 半導体ウエハの熱処理方法 |