JPS50118669A - - Google Patents
Info
- Publication number
- JPS50118669A JPS50118669A JP2329474A JP2329474A JPS50118669A JP S50118669 A JPS50118669 A JP S50118669A JP 2329474 A JP2329474 A JP 2329474A JP 2329474 A JP2329474 A JP 2329474A JP S50118669 A JPS50118669 A JP S50118669A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2329474A JPS50118669A (cs) | 1974-03-01 | 1974-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2329474A JPS50118669A (cs) | 1974-03-01 | 1974-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50118669A true JPS50118669A (cs) | 1975-09-17 |
Family
ID=12106579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2329474A Pending JPS50118669A (cs) | 1974-03-01 | 1974-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50118669A (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242075A (en) * | 1975-09-29 | 1977-04-01 | Nippon Denso Co Ltd | Device for controlling gas atmosphere in semiconductor producing equip ment |
| JPS63313826A (ja) * | 1987-06-16 | 1988-12-21 | Fujitsu Ltd | 気相エピタキシャル成長方法 |
-
1974
- 1974-03-01 JP JP2329474A patent/JPS50118669A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242075A (en) * | 1975-09-29 | 1977-04-01 | Nippon Denso Co Ltd | Device for controlling gas atmosphere in semiconductor producing equip ment |
| JPS63313826A (ja) * | 1987-06-16 | 1988-12-21 | Fujitsu Ltd | 気相エピタキシャル成長方法 |