JPS5011640B1 - - Google Patents
Info
- Publication number
- JPS5011640B1 JPS5011640B1 JP45027730A JP2773070A JPS5011640B1 JP S5011640 B1 JPS5011640 B1 JP S5011640B1 JP 45027730 A JP45027730 A JP 45027730A JP 2773070 A JP2773070 A JP 2773070A JP S5011640 B1 JPS5011640 B1 JP S5011640B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45027730A JPS5011640B1 (Direct) | 1970-04-01 | 1970-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45027730A JPS5011640B1 (Direct) | 1970-04-01 | 1970-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5011640B1 true JPS5011640B1 (Direct) | 1975-05-02 |
Family
ID=12229121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45027730A Pending JPS5011640B1 (Direct) | 1970-04-01 | 1970-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5011640B1 (Direct) |
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1970
- 1970-04-01 JP JP45027730A patent/JPS5011640B1/ja active Pending