JPS5011385A - - Google Patents
Info
- Publication number
- JPS5011385A JPS5011385A JP48059857A JP5985773A JPS5011385A JP S5011385 A JPS5011385 A JP S5011385A JP 48059857 A JP48059857 A JP 48059857A JP 5985773 A JP5985773 A JP 5985773A JP S5011385 A JPS5011385 A JP S5011385A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48059857A JPS5011385A (enExample) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48059857A JPS5011385A (enExample) | 1973-05-30 | 1973-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5011385A true JPS5011385A (enExample) | 1975-02-05 |
Family
ID=13125257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48059857A Pending JPS5011385A (enExample) | 1973-05-30 | 1973-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5011385A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54128681A (en) * | 1978-03-29 | 1979-10-05 | Kyushu Nippon Electric | Semiconductor substrate supporting stand for vision exposure device |
| JPS5581947U (enExample) * | 1978-11-30 | 1980-06-05 |
-
1973
- 1973-05-30 JP JP48059857A patent/JPS5011385A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54128681A (en) * | 1978-03-29 | 1979-10-05 | Kyushu Nippon Electric | Semiconductor substrate supporting stand for vision exposure device |
| JPS5581947U (enExample) * | 1978-11-30 | 1980-06-05 |