JPS5011385A - - Google Patents

Info

Publication number
JPS5011385A
JPS5011385A JP48059857A JP5985773A JPS5011385A JP S5011385 A JPS5011385 A JP S5011385A JP 48059857 A JP48059857 A JP 48059857A JP 5985773 A JP5985773 A JP 5985773A JP S5011385 A JPS5011385 A JP S5011385A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48059857A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48059857A priority Critical patent/JPS5011385A/ja
Publication of JPS5011385A publication Critical patent/JPS5011385A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP48059857A 1973-05-30 1973-05-30 Pending JPS5011385A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48059857A JPS5011385A (enrdf_load_stackoverflow) 1973-05-30 1973-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48059857A JPS5011385A (enrdf_load_stackoverflow) 1973-05-30 1973-05-30

Publications (1)

Publication Number Publication Date
JPS5011385A true JPS5011385A (enrdf_load_stackoverflow) 1975-02-05

Family

ID=13125257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48059857A Pending JPS5011385A (enrdf_load_stackoverflow) 1973-05-30 1973-05-30

Country Status (1)

Country Link
JP (1) JPS5011385A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54128681A (en) * 1978-03-29 1979-10-05 Kyushu Nippon Electric Semiconductor substrate supporting stand for vision exposure device
JPS5581947U (enrdf_load_stackoverflow) * 1978-11-30 1980-06-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54128681A (en) * 1978-03-29 1979-10-05 Kyushu Nippon Electric Semiconductor substrate supporting stand for vision exposure device
JPS5581947U (enrdf_load_stackoverflow) * 1978-11-30 1980-06-05

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