JPS50113428U - - Google Patents
Info
- Publication number
- JPS50113428U JPS50113428U JP2168974U JP2168974U JPS50113428U JP S50113428 U JPS50113428 U JP S50113428U JP 2168974 U JP2168974 U JP 2168974U JP 2168974 U JP2168974 U JP 2168974U JP S50113428 U JPS50113428 U JP S50113428U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974021689U JPS5418897Y2 (https=) | 1974-02-25 | 1974-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974021689U JPS5418897Y2 (https=) | 1974-02-25 | 1974-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50113428U true JPS50113428U (https=) | 1975-09-16 |
| JPS5418897Y2 JPS5418897Y2 (https=) | 1979-07-14 |
Family
ID=28113518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974021689U Expired JPS5418897Y2 (https=) | 1974-02-25 | 1974-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5418897Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0419900U (https=) * | 1990-05-31 | 1992-02-19 | ||
| JP2021134880A (ja) * | 2020-02-28 | 2021-09-13 | 株式会社フジキン | ガスボックス、ガスボックスシステムおよび半導体製造装置 |
-
1974
- 1974-02-25 JP JP1974021689U patent/JPS5418897Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0419900U (https=) * | 1990-05-31 | 1992-02-19 | ||
| JP2021134880A (ja) * | 2020-02-28 | 2021-09-13 | 株式会社フジキン | ガスボックス、ガスボックスシステムおよび半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5418897Y2 (https=) | 1979-07-14 |