JPS50113428U - - Google Patents

Info

Publication number
JPS50113428U
JPS50113428U JP2168974U JP2168974U JPS50113428U JP S50113428 U JPS50113428 U JP S50113428U JP 2168974 U JP2168974 U JP 2168974U JP 2168974 U JP2168974 U JP 2168974U JP S50113428 U JPS50113428 U JP S50113428U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2168974U
Other languages
Japanese (ja)
Other versions
JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974021689U priority Critical patent/JPS5418897Y2/ja
Publication of JPS50113428U publication Critical patent/JPS50113428U/ja
Application granted granted Critical
Publication of JPS5418897Y2 publication Critical patent/JPS5418897Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
JP1974021689U 1974-02-25 1974-02-25 Expired JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974021689U JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-25 1974-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974021689U JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-25 1974-02-25

Publications (2)

Publication Number Publication Date
JPS50113428U true JPS50113428U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-09-16
JPS5418897Y2 JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-14

Family

ID=28113518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974021689U Expired JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-25 1974-02-25

Country Status (1)

Country Link
JP (1) JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0419900U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-05-31 1992-02-19
JP2021134880A (ja) * 2020-02-28 2021-09-13 株式会社フジキン ガスボックス、ガスボックスシステムおよび半導体製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0419900U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-05-31 1992-02-19
JP2021134880A (ja) * 2020-02-28 2021-09-13 株式会社フジキン ガスボックス、ガスボックスシステムおよび半導体製造装置

Also Published As

Publication number Publication date
JPS5418897Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-14

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