JPS50113347U - - Google Patents
Info
- Publication number
- JPS50113347U JPS50113347U JP2275674U JP2275674U JPS50113347U JP S50113347 U JPS50113347 U JP S50113347U JP 2275674 U JP2275674 U JP 2275674U JP 2275674 U JP2275674 U JP 2275674U JP S50113347 U JPS50113347 U JP S50113347U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2275674U JPS50113347U (enExample) | 1974-02-27 | 1974-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2275674U JPS50113347U (enExample) | 1974-02-27 | 1974-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50113347U true JPS50113347U (enExample) | 1975-09-16 |
Family
ID=28116539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2275674U Pending JPS50113347U (enExample) | 1974-02-27 | 1974-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50113347U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59132127A (ja) * | 1983-01-19 | 1984-07-30 | Toshiba Corp | レジストパタ−ンの形成方法及び装置 |
| JPH08252506A (ja) * | 1996-03-08 | 1996-10-01 | Dainippon Screen Mfg Co Ltd | シリカ系被膜形成用基板処理装置 |
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1974
- 1974-02-27 JP JP2275674U patent/JPS50113347U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59132127A (ja) * | 1983-01-19 | 1984-07-30 | Toshiba Corp | レジストパタ−ンの形成方法及び装置 |
| JPH08252506A (ja) * | 1996-03-08 | 1996-10-01 | Dainippon Screen Mfg Co Ltd | シリカ系被膜形成用基板処理装置 |