JPS50111983A - - Google Patents
Info
- Publication number
- JPS50111983A JPS50111983A JP988374A JP988374A JPS50111983A JP S50111983 A JPS50111983 A JP S50111983A JP 988374 A JP988374 A JP 988374A JP 988374 A JP988374 A JP 988374A JP S50111983 A JPS50111983 A JP S50111983A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988374A JPS5242658B2 (ru) | 1974-01-22 | 1974-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988374A JPS5242658B2 (ru) | 1974-01-22 | 1974-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50111983A true JPS50111983A (ru) | 1975-09-03 |
| JPS5242658B2 JPS5242658B2 (ru) | 1977-10-26 |
Family
ID=11732539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP988374A Expired JPS5242658B2 (ru) | 1974-01-22 | 1974-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5242658B2 (ru) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364559U (ru) * | 1976-11-04 | 1978-05-31 | ||
| JPH08240698A (ja) * | 1995-03-06 | 1996-09-17 | Fujitsu Ltd | 加熱絞り、これを用いた荷電粒子ビーム装置及び荷電粒子ビーム照射方法 |
-
1974
- 1974-01-22 JP JP988374A patent/JPS5242658B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364559U (ru) * | 1976-11-04 | 1978-05-31 | ||
| JPS6011641Y2 (ja) * | 1976-11-04 | 1985-04-17 | 富士通株式会社 | 電子ビ−ム露光装置 |
| JPH08240698A (ja) * | 1995-03-06 | 1996-09-17 | Fujitsu Ltd | 加熱絞り、これを用いた荷電粒子ビーム装置及び荷電粒子ビーム照射方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5242658B2 (ru) | 1977-10-26 |