JPS50111778A - - Google Patents
Info
- Publication number
- JPS50111778A JPS50111778A JP13778873A JP13778873A JPS50111778A JP S50111778 A JPS50111778 A JP S50111778A JP 13778873 A JP13778873 A JP 13778873A JP 13778873 A JP13778873 A JP 13778873A JP S50111778 A JPS50111778 A JP S50111778A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13778873A JPS50111778A (ja) | 1973-12-12 | 1973-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13778873A JPS50111778A (ja) | 1973-12-12 | 1973-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50111778A true JPS50111778A (ja) | 1975-09-02 |
Family
ID=15206847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13778873A Pending JPS50111778A (ja) | 1973-12-12 | 1973-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50111778A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119512A (ja) * | 1984-11-13 | 1986-06-06 | Showa Denko Kenzai Kk | 未硬化成形品の浮上搬送方法及び装置 |
| JPS63300017A (ja) * | 1987-05-29 | 1988-12-07 | Kishimoto Sangyo Kk | 半導体ウエハ−の移送方法ならびにその装置 |
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1973
- 1973-12-12 JP JP13778873A patent/JPS50111778A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119512A (ja) * | 1984-11-13 | 1986-06-06 | Showa Denko Kenzai Kk | 未硬化成形品の浮上搬送方法及び装置 |
| JPH0446859B2 (ja) * | 1984-11-13 | 1992-07-31 | Showa Denko Kenzai Kk | |
| JPS63300017A (ja) * | 1987-05-29 | 1988-12-07 | Kishimoto Sangyo Kk | 半導体ウエハ−の移送方法ならびにその装置 |