JPS5011175U - - Google Patents
Info
- Publication number
- JPS5011175U JPS5011175U JP1973061237U JP6123773U JPS5011175U JP S5011175 U JPS5011175 U JP S5011175U JP 1973061237 U JP1973061237 U JP 1973061237U JP 6123773 U JP6123773 U JP 6123773U JP S5011175 U JPS5011175 U JP S5011175U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Mixers Of The Rotary Stirring Type (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973061237U JPS5145010Y2 (https=) | 1973-05-26 | 1973-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973061237U JPS5145010Y2 (https=) | 1973-05-26 | 1973-05-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5011175U true JPS5011175U (https=) | 1975-02-05 |
| JPS5145010Y2 JPS5145010Y2 (https=) | 1976-11-01 |
Family
ID=28221603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1973061237U Expired JPS5145010Y2 (https=) | 1973-05-26 | 1973-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5145010Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53106866U (https=) * | 1977-02-03 | 1978-08-28 | ||
| JP2016025134A (ja) * | 2014-07-17 | 2016-02-08 | 芝浦メカトロニクス株式会社 | レジスト剥離液浄化装置及び基板処理装置 |
-
1973
- 1973-05-26 JP JP1973061237U patent/JPS5145010Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53106866U (https=) * | 1977-02-03 | 1978-08-28 | ||
| JP2016025134A (ja) * | 2014-07-17 | 2016-02-08 | 芝浦メカトロニクス株式会社 | レジスト剥離液浄化装置及び基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5145010Y2 (https=) | 1976-11-01 |